Coaxial lithography

Tuncay Ozel, Gilles Bourret, Chad A Mirkin

Research output: Contribution to journalArticlepeer-review

Translated title of the contributionCoaxial lithography
Original languageEnglish
Pages (from-to)319-324
JournalNature Nanotechnology
Publication statusPublished - 2015

Fields of Science and Technology Classification 2012

  • 103 Physics, Astronomy
  • 210 Nanotechnology

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